Powder Diffraction Data of Aluminum-Rich FCC-Ti1−xAlxN Prepared by CVD

Fcc-Ti1−xAlxN-based coatings obtained by Physical Vapor Deposition (PVD) or Chemical (CVD) are widely used as wear-resistant coatings. However, there exists no JCPDF card of fcc-Ti1−xAlxN for the XRD analysis such based on experimental data. In this work, an aluminum-rich powder was prepared and, first time, a diffraction file determined experimentally. step, 10 µm thick Ti1−xAlxN coating deposited steel foil and cemented carbide inserts CVD. The etched flakes free-standing layer were which part consisted pure fcc phase. A produced using major layer. Following coating, flake characterized X-ray (XRD), scanning electron microscopy (SEM), selected area high-resolution transmission (SAED–HRTEM), wavelength dispersive spectroscopy (WDS) energy (EDS). 88% fcc-Ti1−xAlxN. stoichiometric coefficient measured containing only value x = 0.87 obtained. Based sample, data phase lattice constant in to be 0.407168 nm. Finally, complete dataset comprising relative intensities parameters fcc-Ti0.13Al0.87N provided.